Static Modeling of a Bi-axial Micro-mirror with Sidewall Electrodes

The static modeling of a bi-axial torsional micro-mirror with sidewall electrodes is investigated. The mirror and sidewall electrodes experience different voltages. As a result of the potential difference, the mirror rotates about x and y axes with the torques generated from electrostatic forces by the sidewall and bottom electrodes. The rotations about two axes are made possible using a gimbal frame and serpentine springs. An analytical model is presented that is a simplified model of a previous study based on independent excitation of the two rotation angles. The simplified model enables prediction of the rotation angles with good accuracy and faster computation time.